info_mav_euv_deltam.xml
5.75 KB
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
<?xml version="1.0" encoding="UTF-8"?>
<paraminfo id="mav_euv_deltam">
<dimensions dim_1="190"/>
<tables>
<table relatedDim="dim_1" name="WaveLength" units="nm">
<channel min="0" max="1"/><channel min="1" max="2"/><channel min="2" max="3"/>
<channel min="3" max="4"/><channel min="4" max="5"/><channel min="5" max="6"/>
<channel min="6" max="7"/><channel min="7" max="8"/><channel min="8" max="9"/>
<channel min="9" max="10"/><channel min="10" max="11"/><channel min="11" max="12"/>
<channel min="12" max="13"/><channel min="13" max="14"/><channel min="14" max="15"/>
<channel min="15" max="16"/><channel min="16" max="17"/><channel min="17" max="18"/>
<channel min="18" max="19"/><channel min="19" max="20"/><channel min="20" max="21"/>
<channel min="21" max="22"/><channel min="22" max="23"/><channel min="23" max="24"/>
<channel min="24" max="25"/><channel min="25" max="26"/><channel min="26" max="27"/>
<channel min="27" max="28"/><channel min="28" max="29"/><channel min="29" max="30"/>
<channel min="30" max="31"/><channel min="31" max="32"/><channel min="32" max="33"/>
<channel min="33" max="34"/><channel min="34" max="35"/><channel min="35" max="36"/>
<channel min="36" max="37"/><channel min="37" max="38"/><channel min="38" max="39"/>
<channel min="39" max="40"/><channel min="40" max="41"/><channel min="41" max="42"/>
<channel min="42" max="43"/><channel min="43" max="44"/><channel min="44" max="45"/>
<channel min="45" max="46"/><channel min="46" max="47"/><channel min="47" max="48"/>
<channel min="48" max="49"/><channel min="49" max="50"/>
<channel min="50" max="51"/><channel min="51" max="52"/><channel min="52" max="53"/>
<channel min="53" max="54"/><channel min="54" max="55"/><channel min="55" max="56"/>
<channel min="56" max="57"/><channel min="57" max="58"/><channel min="58" max="59"/>
<channel min="59" max="60"/><channel min="60" max="61"/><channel min="61" max="62"/>
<channel min="62" max="63"/><channel min="63" max="64"/><channel min="64" max="65"/>
<channel min="65" max="66"/><channel min="66" max="67"/><channel min="67" max="68"/>
<channel min="68" max="69"/><channel min="69" max="70"/><channel min="70" max="71"/>
<channel min="71" max="72"/><channel min="72" max="73"/><channel min="73" max="74"/>
<channel min="74" max="75"/><channel min="75" max="76"/><channel min="76" max="77"/>
<channel min="77" max="78"/><channel min="78" max="79"/><channel min="79" max="80"/>
<channel min="80" max="81"/><channel min="81" max="82"/><channel min="82" max="83"/>
<channel min="83" max="84"/><channel min="84" max="85"/><channel min="85" max="86"/>
<channel min="86" max="87"/><channel min="87" max="88"/><channel min="88" max="89"/>
<channel min="89" max="90"/><channel min="90" max="91"/><channel min="91" max="92"/>
<channel min="92" max="93"/><channel min="93" max="94"/><channel min="94" max="95"/>
<channel min="95" max="96"/><channel min="96" max="97"/><channel min="97" max="98"/>
<channel min="98" max="99"/><channel min="99" max="100"/><channel min="100" max="101"/>
<channel min="101" max="102"/><channel min="102" max="103"/><channel min="103" max="104"/>
<channel min="104" max="105"/><channel min="105" max="106"/><channel min="106" max="107"/>
<channel min="107" max="108"/><channel min="108" max="109"/><channel min="109" max="110"/>
<channel min="110" max="111"/><channel min="111" max="112"/><channel min="112" max="113"/>
<channel min="113" max="114"/><channel min="114" max="115"/><channel min="115" max="116"/>
<channel min="116" max="117"/><channel min="117" max="118"/><channel min="118" max="119"/>
<channel min="119" max="120"/><channel min="120" max="121"/><channel min="121" max="122"/>
<channel min="122" max="123"/><channel min="123" max="124"/><channel min="124" max="125"/>
<channel min="125" max="126"/><channel min="126" max="127"/><channel min="127" max="128"/>
<channel min="128" max="129"/><channel min="129" max="130"/><channel min="130" max="131"/>
<channel min="131" max="132"/><channel min="132" max="133"/><channel min="133" max="134"/>
<channel min="134" max="135"/><channel min="135" max="136"/><channel min="136" max="137"/>
<channel min="137" max="138"/><channel min="138" max="139"/><channel min="139" max="140"/>
<channel min="140" max="141"/><channel min="141" max="142"/><channel min="142" max="143"/>
<channel min="143" max="144"/><channel min="144" max="145"/><channel min="145" max="146"/>
<channel min="146" max="147"/><channel min="147" max="148"/>
<channel min="148" max="149"/><channel min="149" max="150"/><channel min="150" max="151"/>
<channel min="151" max="152"/><channel min="152" max="153"/><channel min="153" max="154"/>
<channel min="154" max="155"/><channel min="155" max="156"/><channel min="156" max="157"/>
<channel min="157" max="158"/><channel min="158" max="159"/><channel min="159" max="160"/>
<channel min="160" max="161"/><channel min="161" max="162"/><channel min="162" max="163"/>
<channel min="163" max="164"/><channel min="164" max="165"/><channel min="165" max="166"/>
<channel min="166" max="167"/><channel min="167" max="168"/><channel min="168" max="169"/>
<channel min="169" max="170"/><channel min="170" max="171"/><channel min="171" max="172"/>
<channel min="172" max="173"/><channel min="173" max="174"/><channel min="174" max="175"/>
<channel min="175" max="176"/><channel min="176" max="177"/><channel min="177" max="178"/>
<channel min="178" max="179"/><channel min="179" max="180"/><channel min="180" max="181"/>
<channel min="181" max="182"/><channel min="182" max="183"/><channel min="183" max="184"/>
<channel min="184" max="185"/><channel min="185" max="186"/><channel min="186" max="187"/>
<channel min="187" max="188"/><channel min="188" max="189"/><channel min="189" max="190"/>
</table>
</tables>
</paraminfo>